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MEMS Silicon Cavity filter

Silicon Cavity MEMS series
Frequency range:2~30GHz

Features
High precision MEMS process
High performance, shielded, Micro-Cavity structure
Silicon base, 50 Ω CPW output
Au bonding for MCM application
Operating Temperature -55~+85℃
Storage Temperature -55~+100℃
RF Power Input ≤8W
Center Frequency f0 : 2-20GHz
BW3dB : 1.3 – 35%
Insertion [email protected] : IL0
VSWR 1.6
Impedance 50Ω


Slope Factor : BW30dB/ BW3dB≤1.7
(Given as 6 Sections) BW40dB/ BW3dB≤2
BW50dB/ BW3dB≤2.3

Suggested assemble method

PRODUCTS